Simulation and Design of AlGaAs/InGaAs CCDs Based on pHEMT Technology

Author

Tan, Hiang Teik ; Hunter, Ian C. ; Snowden, Christopher M.

Author_Institution

Avago Technol. Malaysia, Penang

Volume

54

Issue

7

fYear

2007

fDate

7/1/2007 12:00:00 AM

Firstpage

1597

Lastpage

1604

Abstract

This paper describes the modeling, design, and fabrication of quarter-micrometer double delta-doped AlGaAs/InGaAs charge-coupled devices (CCDs) whose epitaxial layers and geometry were based around the device structure of commercial pHEMTs. A quasi-2-D physical model has been developed to investigate the properties of this novel 2-D electron gas CCD. This physical model allows the characteristics of the InGaAs transport channel as well as the dc characteristics of the device to be predicted within a reasonable amount of time. This model also shows how "individual" charge packets can be controllably transferred through the device when appropriate clocking voltages are applied to the gates of the CCD. This capacitive gate structure device is then shown to be successfully fabricated using established GaAs heterostructure fabrication techniques to ensure good repeatability. The dc characteristics of the fabricated CCD delay line are included.

Keywords

III-V semiconductors; aluminium compounds; charge-coupled devices; delay lines; gallium arsenide; high electron mobility transistors; indium compounds; two-dimensional electron gas; wide band gap semiconductors; 2-D electron gas CCD; AlGaAs-InGaAs - Interface; charge packet; delay line,; epitaxial layer; pHEMT technology; quarter-micrometer double delta-doped charge-coupled devices; quasi-2-D physical modeling; simu ated charge transfer; Charge coupled devices; Electrons; Epitaxial layers; Fabrication; Geometry; Indium gallium arsenide; PHEMTs; Predictive models; Semiconductor process modeling; Solid modeling; 2-D electron gas charge-coupled device (2DEG-CCDs); Delay line; quasi-2-D physical modeling; simulated charge transfer;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/TED.2007.898459

Filename

4252384