Title :
Driving Current Dependence of Aging Drift in 600MHz Band Saw Resonators
Author :
Koshino, M. ; Yamashita, K. ; Kurokawa, T. ; Ebata, Y. ; Takase, M.
Author_Institution :
Electron Tube and Device Group, Toshiba Corporation
Abstract :
SAW resonators driven at high driving levels are known to suffer from degradation of electrical arac- characteristics caused by stress induced metal-migration in the aluminum thin film transducers and reflectors(1), (2). The migration phenomenon is similar to an electro-migration which has been observed in aluminum film conductors of semiconductor integrated circuit.
Keywords :
Aging; Aluminum; Conductive films; Degradation; Optical films; Semiconductor thin films; Stress; Surface acoustic waves; Thin film circuits; Transducers;
Journal_Title :
Consumer Electronics, IEEE Transactions on
DOI :
10.1109/TCE.1986.290091
