Capacity-coupled multidischarge at atmospheric pressure

Author

Mase, Hiroshi ; Fujiwara, Tamiya ; Sato, Noriyoshi

Author_Institution

Fac. of Eng., Ibaraki Univ., Hitachi, Japan

Volume

32

Issue

2

fYear

2004

fDate

4/1/2004 12:00:00 AM

Firstpage

380

Lastpage

383

Abstract

A new method of plasma production at atmospheric pressure, capacity-coupled multidischarge (CCMD), is proposed. The discharge gaps in the CCMD consist of a common electrode and a number of compact electrodes (CCE) which are directly coupled with small capacitors for quenching the discharge. A simple CCE structure is provided by a cylindrical capacitor, the inner conductor of which is used as a gap electrode. A short pulse discharge is observed to appear homogeneously at each CCE. A charge transfer for the single pulsed discharge is 10-100 times as large as that of the conventional dielectric barrier discharge. In the CCMD using O₂ gas, a high efficiency of ozone production has been obtained. A device configuration of the CCMD is quite flexible with respect to its geometrical shape and size. The CCMD could be used to produce plasmas for various kinds of industrial applications at atmospheric pressure.

Keywords

capacitance; discharges (electric); ozone; plasma devices; plasma production; CCMD; O₂; O₃; atmospheric pressure; capacity-coupled multidischarge; charge transfer; common electrodes; compact electrodes; conventional dielectric barrier discharge; cylindrical capacitor; discharge gaps; gap electrode; ozone production; plasma production; single pulse discharge; Atmospheric-pressure plasmas; Capacitors; Charge transfer; Conductors; Dielectrics; Electrodes; Plasma applications; Plasma devices; Production; Shape; Atmospheric pressure; discharge; ozone generation; plasma production;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2004.828116

Filename

1308479