Title :
Maximum packing density and minimum size of semiconductor devices
Author_Institution :
Radio Corporation of America, Sommerville, N. J.
Keywords :
Boundary conditions; Charge carrier density; Delay lines; Diffusion processes; Fabrication; Frequency; Germanium; Impedance; Inductance; Passivation; Semiconductor devices; Silicon; Solid state circuits; Substrates; Temperature; Tuners;
Journal_Title :
Electron Devices, IRE Transactions on
DOI :
10.1109/T-ED.1962.14911