Large-rotation and low-voltage driving of micromirror realized by tense thin-film torsion bar

Author

Sasaki, Minoru ; Yuki, Shinya ; Hane, Kazuhiro

Author_Institution

Dept. of Nanomechanics, Tohoku Univ., Sendai

Volume

18

Issue

15

fYear

2006

Firstpage

1573

Lastpage

1575

Abstract

An electrostatically driven micromirror device using a thin-film torsion bar is proposed. The mirror rotation angle of 7.3deg at 5 V is demonstrated at the nonresonant condition. A bulk Si micromirror is suspended by SiN thin-film torsion bars. Inside the torsion bar, the tension having the magnitude larger than that of the driving force is included. The torsion bar can have a compliance with the mirror rotation and the rigidity against the unwanted motions (e.g., vertical displacement or in-plane rotation)

Keywords

electrostatic actuators; micromirrors; silicon compounds; thin film devices; torsion; 5 V; Si micromirror; SiN; SiN thin-film torsion bars; bulk micromirror; driving force; electrostatically driven device; large-rotation micromirror driving; low-voltage micromirror driving; mirror rotation angle; nonresonant condition; rigidity; tense thin-film torsion bar; Bars; Electrostatics; Micromirrors; Mirrors; Semiconductor thin films; Silicon compounds; Springs; Thin film devices; Transistors; Voltage; Electrostatic driving; low-voltage driving; micromirror; tension; thin-film torsion bar;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2006.879587

Filename

1652956