• DocumentCode
    1019618
  • Title

    Impurity profiles in thin, lightly doped, vacuum diffused layers of silicon

  • Author

    Batdorf, B. ; Lee, Lun-Hui ; Wiegmann, W.

  • Author_Institution
    Bell Telephone Laboratories
  • Volume
    9
  • Issue
    6
  • fYear
    1962
  • Firstpage
    512
  • Lastpage
    512
  • Keywords
    Associate members; Biographies; Ceramics; Crystallization; Educational institutions; Electron beams; Germanium; High power amplifiers; Impurities; Laboratories; Low-noise amplifiers; Mechanical engineering; Silicon; Telephony; Temperature; Testing; Transistors;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IRE Transactions on
  • Publisher
    ieee
  • ISSN
    0096-2430
  • Type

    jour

  • DOI
    10.1109/T-ED.1962.15069
  • Filename
    1473297
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1019618