Title :
Programmable via Using Indirectly Heated Phase-Change Switch for Reconfigurable Logic Applications
Author :
Chen, K.N. ; Krusin-Elbaum, L. ; Newns, D.M. ; Elmegreen, B.G. ; Cheek, R. ; Rana, N. ; Young, A.M. ; Koester, S.J. ; Lam, C.
Author_Institution :
IBM T.J. Watson Res. Center, Yorktown Heights
Abstract :
A novel concept for a programmable via using an indirectly heated phase-change switch is proposed and fabricated successfully. In this device concept, circuits associated with the programmable via are decoupled from the configuration circuits by using an independently contacted heater electrode. We demonstrate the prototype device in a standard 180-nm CMOS copper back-end technology.
Keywords :
CMOS digital integrated circuits; logic circuits; phase changing circuits; CMOS; configuration circuits; heater electrodes; indirectly heated phase-change switch; reconfigurable logic applications; CMOS logic circuits; CMOS technology; Field programmable gate arrays; Fuses; Integrated circuit interconnections; Logic arrays; Phase change materials; Prototypes; Reconfigurable logic; Switches; Phase change; programmable; reconfigurable; via;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2007.912016
