Title :
Silicon planar integrated circuitry—Using a unique combination of multilayer epitaxial and diffusion techniques
Author :
Boerger, F.E. ; Martel, C.S. ; Robertson, H.M.
fDate :
3/1/1963 12:00:00 AM
Keywords :
Circuits; Conductivity; Epitaxial growth; Epitaxial layers; Impedance; Impurities; Nonhomogeneous media; Resistors; Silicon; Substrates;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1963.15108
