DocumentCode

1020035

Title

Silicon planar integrated circuitry—Using a unique combination of multilayer epitaxial and diffusion techniques

Author

Boerger, F.E. ; Martel, C.S. ; Robertson, H.M.

Volume

10

Issue

2

fYear

1963

fDate

3/1/1963 12:00:00 AM

Firstpage

101

Lastpage

101

Keywords

Circuits; Conductivity; Epitaxial growth; Epitaxial layers; Impedance; Impurities; Nonhomogeneous media; Resistors; Silicon; Substrates;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1963.15108

Filename

1473411