Title :
Transduction mechanisms in SAW gas sensors
Author :
Nieuwenhuizen, M.S. ; Barendsz, A.W. ; Nieuwkoop, Evert ; Vellekoop, Michael J. ; Venema, A.
Author_Institution :
Prins Maurits Laboratory TNO, Rijswijk, Netherlands
Abstract :
Experimental results are presented for a surface-acoustic-wave gas sensor. At 150°C a pronounced selectivity towards NO2 was observed. The transduction of a chemical signal (concentration) into a physical signal (SAW phase velocity) is discussed in terms of the effect of mass and conductivity changes on sensor response.
Keywords :
chemical variables measurement; electric sensing devices; surface acoustic wave devices; ultrasonic transducers; 150°C; 78.95 MHz; NO2; SAW gas sensors; US transducer; chemical variables measurement; conductivity changes; phase velocity; sensor response; surface-acoustic-wave; ultrasonic applications;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19860128
