DocumentCode
1020487
Title
Kinetic study of liquid phase epitaxial growth on profiled semiconductor substrates
Author
Dong-Hui Zhao ; Hong-Du Liu
Author_Institution
Dept. of Phys., Peking Univ., Beijing, China
Volume
25
Issue
3
fYear
1989
Firstpage
227
Lastpage
228
Abstract
The authors present for the first time a semiquantitative analysis and computer simulation for LPE growth on profiled substrates. The theoretical results are in agreement with the experimental data and can be used for improving the design and fabrication of heterojunction lasers and integrated optic devices.
Keywords
liquid phase epitaxial growth; semiconductor growth; substrates; LPE growth; computer simulation; fabrication; heterojunction lasers; integrated optic devices; liquid phase epitaxial growth; profiled semiconductor substrates; semiquantitative analysis;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19890162
Filename
130882
Link To Document