Title :
Kinetic study of liquid phase epitaxial growth on profiled semiconductor substrates
Author :
Dong-Hui Zhao ; Hong-Du Liu
Author_Institution :
Dept. of Phys., Peking Univ., Beijing, China
Abstract :
The authors present for the first time a semiquantitative analysis and computer simulation for LPE growth on profiled substrates. The theoretical results are in agreement with the experimental data and can be used for improving the design and fabrication of heterojunction lasers and integrated optic devices.
Keywords :
liquid phase epitaxial growth; semiconductor growth; substrates; LPE growth; computer simulation; fabrication; heterojunction lasers; integrated optic devices; liquid phase epitaxial growth; profiled semiconductor substrates; semiquantitative analysis;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19890162
