Title :
Theoretical modeling of microfabricated beams with elastically restrained supports
Author :
Meng, Qingyuan ; Mehregany, Mehran ; Mullen, Robert L.
Author_Institution :
Dept. of Civil Eng., Case Western Reserve Univ., Cleveland, OH, USA
fDate :
9/1/1993 12:00:00 AM
Abstract :
A mathematical model is developed to analyze the mechanical behavior of step-up supports which typically result from surface micromachining. This model accounts for the finite stiffness of the step-up support, which is more accurately represented by an elastically restrained boundary condition rather than a fixed or built-in boundary condition. Based on the model developed, the deflection of cantilever and doubly-supported beams under arbitrarily located concentrated and distributed loads is determined for a wide range of beam geometries. In addition, the buckling load of doubly-supported beams with elastically restrained boundary conditions is analyzed. Finite element analysis verifies the accuracy of the models developed. The models show that significant error in predicting the beam mechanical behavior may result if the finite stiffness of the step-up support is not correctly modeled
Keywords :
boundary-value problems; buckling; elasticity; finite element analysis; micromechanical devices; semiconductor device models; stress analysis; buckling load; concentrated loads; deflection of cantilever; distributed loads; doubly-supported beams; elastically restrained boundary condition; elastically restrained supports; finite element analysis; finite stiffness; load deflection; mechanical behavior; microfabricated beams; step-up supports; surface micromachining; theoretical modeling; Boundary conditions; Error correction; Finite element methods; Geometry; Mathematical model; Micromachining; Micromechanical devices; Predictive models; Solid modeling; Structural beams;
Journal_Title :
Microelectromechanical Systems, Journal of
