Title :
Low-loss high-silica single-mode channel waveguides
Author :
Takato, N. ; Yasu, M. ; Kawachi, M.
Author_Institution :
NTT Ibaraki Electrical Communication Laboratory, Tokai, Japan
Abstract :
Low-loss high-silica single-mode channel optical waveguides of 0.1 dB/cm have been fabricated on crystal silicon substrates with fibre coupling losses of less than 0.05 dB by flame hydrolysis deposition and reactive ion etching. Directional couplers have also been fabricated with excess loss of 0.5 dB by this waveguide fabrication technique.
Keywords :
directional couplers; integrated optics; optical couplers; optical waveguides; optical workshop techniques; sputter etching; Si crystal substrate; directional couplers; fabrication technique; flame hydrolysis deposition; high-silica type; integrated optics; low-loss type; optical waveguides; optical workshop techniques; reactive ion etching; single-mode channel waveguides;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19860220
