Title :
Miniature optical waveguide modulator in AlGaAs/GaAs using carrier depletion
Author :
Wu, X.S. ; Alping, Arne ; Vawter, A. ; Coldren, Larry A.
Author_Institution :
University of California, Department of Electrical & Computer Engineering, Santa Barbara, USA
Abstract :
The characteristics of an optical waveguide phase shifter using free-carrier depletion in a reverse-biased double-heterostructure p-n junction are given for the first time. Ridge waveguides were fabricated by liquid-phase epitaxy and wet chemical etching in AlGaAs/GaAs. The largest phase-shifting efficiency (54°/V mm) ever reported in a reverse-biased structure was observed.
Keywords :
III-V semiconductors; aluminium compounds; gallium arsenide; integrated optics; integrated optoelectronics; optical communication equipment; optical modulation; optical waveguide components; phase modulation; AlGaAs/GaAs; III-V semiconductors; LPE; double-heterostructure p- n junction; free-carrier depletion; integrated optics; integrated optoelectronics; liquid-phase epitaxy; miniature type; optical communication equipment; optical waveguide phase shifter; phase modulation; reverse-biased structure; ridge waveguide type; wet chemical etching;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19860225
