Title :
Investigation of thermally oxidized silicon surfaces using metal-oxide-semiconductor structures
Author :
Grove, A.S. ; Deal, B.E. ; Snow, E.H. ; Sah, C.T.
fDate :
11/1/1964 12:00:00 AM
Keywords :
Boron; Charge carrier processes; Conductors; Density measurement; Electron mobility; Reproducibility of results; Silicon; Snow; Stability; Thermal conductivity;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1964.15387
