DocumentCode

1022793

Title

Investigation of thermally oxidized silicon surfaces using metal-oxide-semiconductor structures

Author

Grove, A.S. ; Deal, B.E. ; Snow, E.H. ; Sah, C.T.

Volume

11

Issue

11

fYear

1964

fDate

11/1/1964 12:00:00 AM

Firstpage

531

Lastpage

531

Keywords

Boron; Charge carrier processes; Conductors; Density measurement; Electron mobility; Reproducibility of results; Silicon; Snow; Stability; Thermal conductivity;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1964.15387

Filename

1473775