Title :
Evaluation of channel properties by metal insulator semiconductor measurements
Author :
Nicollian, E.H. ; Goetzberger, A.
fDate :
11/1/1964 12:00:00 AM
Keywords :
Capacitance; Conducting materials; Density measurement; Electrodes; Insulation; Laboratories; Metal-insulator structures; Silicon; Surface resistance; Surface treatment;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1964.15389
