Title :
Self-adjusted permanent attachment of fibres to GaAs waveguide components
Author :
Kaufmann, H. ; Buchmann, Peter ; Hirter, R. ; Melchior, H. ; Guekos, G.
Author_Institution :
Swiss Federal Institute of Technology, ETH Hönggerbery, Zÿrich, Switzerland
Abstract :
We present a self-aligned flip-chip mounting technique for permanent coupling of single-mode fibres to rib waveguides By help of reactive-ion-etched alignment ribs and preferentially etched silicon V-grooves, self-adjusted alignment with excess coupling loss as low as 0.3 dB has been achieved.
Keywords :
III-V semiconductors; gallium arsenide; integrated optics; optical couplers; optical fibres; GaAs waveguide components; RIE; excess coupling loss; permanent attachment of fibres; permanent coupling; preferentially etched Si V-grooves; reactive-ion-etched alignment ribs; self-adjusted alignment; self-aligned flip-chip mounting technique; semiconductors; single-mode fibres to rib waveguides;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19860440
