Title :
Microwave surface resistance of reactively sputtered NbN thin films
Author :
Bautista, J.J. ; Strayer, D.M. ; Berry, M.J. ; Faris, S.M.
Author_Institution :
California Institute of Technology, Pasadena, CA
fDate :
3/1/1987 12:00:00 AM
Abstract :
The surface resistance of niobium nitride (NbN) thin films has been measured at 7.78 and 10.14 GHz in the temperature range of 1.5 to 4.2 K. The films were reactively sputtered on sapphire substrates to a thickness of approximately one micron. The surface resistance was determined by measuring the quality factor (Q) of the TEO11 mode of a lead-plated copper cavity where the NbN served as one end-cap of the cavity.
Keywords :
Microwave filters; Resistance measurements; Slow-wave structures; Superconducting cavity resonators; Superconducting films; Electrical resistance measurement; Sputtering; Substrates; Superconducting device noise; Superconducting devices; Superconducting films; Superconducting microwave devices; Superconducting transmission lines; Surface resistance; Temperature;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.1987.1064990
