Low-loss slow-wave propagation along a microstructure transmission line on a silicon surface

We report observations of relatively low-loss propagation in the frequency range of 1.0 to 12.4 GHz using a micrometer-size coplanar MIS transmission line fabricated on a heavily doped N + silicon surface. This low-loss mode of propagation is found to be accompanied by significant wavelength reduction which suggests that such lines may be useful as transmission media for distributed components in silicon monolithic microwave integrated circuits (MMICs).