• DocumentCode
    1025291
  • Title

    Josephson integrated circuit process for scientific applications

  • Author

    Sandstrom, R.L. ; Kleinsasser, A.W. ; Gallagher, W.J. ; Raider, S.I.

  • Author_Institution
    IBM Thomas J. Watson Research Center, Yorktown Heights, NY
  • Volume
    23
  • Issue
    2
  • fYear
    1987
  • fDate
    3/1/1987 12:00:00 AM
  • Firstpage
    1484
  • Lastpage
    1488
  • Abstract
    We have developed and are regularly practicing a seven mask-level Josephson integrated circuit fabrication process tailored to dc SQUID requirements and intended for SQUID studies and other scientific applications of Josephson technology. The process incorporates low capacitance Nb/Nb2O5/PbAuIn edge junctions, PdAu shunt resistors, and a wiring pitch of 5 μm for the SQUID input coil level (which is PbAuIn). The junctions can be made as small as 2μm by 0.3μm, with a capacitance (including parasitics) of ∼0.14 pF. This process yields stable and reliable junctions and integrated circuits.
  • Keywords
    Josephson devices; Application specific integrated circuits; Coils; Fabrication; Integrated circuit technology; Integrated circuit yield; Niobium; Parasitic capacitance; Resistors; SQUIDs; Wiring;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/TMAG.1987.1065115
  • Filename
    1065115
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1025291