Hybrid Schottky injection MOS-gated power transistor

A modified Schottky injection field effect transistor (SINFET) which offers lower on-resistance and a switching speed comparable to conventional n-channel LDMOSTs is described. The fabrication process is similar to that of an LDMOS transistor but with the high-low (n+n-) `ohmic¿ contact at the drain replaced by a parallel combination of a Schottky barrier and a pn junction diode. This hybrid anode injects minority carriers into the n- drift region, which in turn provides conductivity modulation. A current handling capability 3.5 times larger than that of the LDMOST is achieved. With the minority carrier injection level limited by the Schottky barrier, the total amount of minority carriers injected by the hybrid anode is much lower than that injected by the pn junction diode alone. Thus, the device speed is comparable to the conventional n-channel LDMOST. By minimising the shunting resistance in the p-channel region, devices with a latch-up current density of 400 A/cm2 are obtained.