DocumentCode :
1026441
Title :
An investigation of Si-SiO
2
and Si-Ta
2
O
5
interfaces prepared by reactive sputtering
Author :
Akiyama, Kazunari ; Ishihara, Takuya ; Takemoto, T. ; Terui, Y.
Author_Institution :
Matsushita Electric Industrial Company, Ltd.
Issue :
42591
fYear :
1966
Firstpage :
672
Lastpage :
672
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1966.15765
Filename :
1474355
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1026441
