• DocumentCode
    1026739
  • Title

    Optical activation of a silicon vibrating sensor

  • Author

    Andres, Miguel V. ; Foulds, K.W.H. ; Tudor, M.J.

  • Author_Institution
    University of Valencia, Department of Electricity & Magnetism, Valencia, Spain
  • Volume
    22
  • Issue
    21
  • fYear
    1986
  • Firstpage
    1097
  • Lastpage
    1099
  • Abstract
    The operation of a micromachined silicon vibrating sensor with both optical excitation and optical interrogation is reported. The proper locations at which the optical excitation should be applied for optimum excitation of different modes of resonance are described.
  • Keywords
    electric sensing devices; elemental semiconductors; vibration measurement; Si; modes; optical excitation; optical interrogation; resonance; vibrating sensor;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19860752
  • Filename
    4256966
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1026739