Title :
Modified Duc de Chaulnes´ method for measurement of mode indexes of semiconductor slab waveguides
Author :
Ura, Shogo ; Suhara, Toshiaki ; Nishihara, Hiroshi
Author_Institution :
Dept. of Electron. Eng., Osaka Univ., Japan
Abstract :
For measuring mode indexes of AlGaAs waveguides, a modified Duc de Chaulnes method, which is noncontact, nondestructive, and applicable to high index as well as buried waveguide, is proposed and discussed. Mode indexes are measured by reference to the substrate index by comparing waveguide and substrate in the displacement of image. Measurement accuracy is improved in comparison with the conventional Duc de Chaulnes method. From experimental work on the identification accuracy of the imaging objective position, it was confirmed that the error in the mode index was smaller than 0.2%.<>
Keywords :
III-V semiconductors; aluminium compounds; gallium arsenide; integrated optics; measurement errors; optical testing; optical waveguides; refractive index measurement; AlGaAs; AlGaAs waveguides; Duc de Chaulnes´ method; buried waveguide; high index; identification accuracy; image displacement; imaging objective position; measurement accuracy; mode index errors; mode indexes; noncontact,; nondestructive; semiconductor slab waveguides; substrate index; Displacement measurement; Focusing; Gratings; Length measurement; Optical waveguides; Position measurement; Refractive index; Semiconductor waveguides; Slabs; Substrates;
Journal_Title :
Photonics Technology Letters, IEEE
