DocumentCode :
1027092
Title :
Magnetic and structural properties of dual ion beam sputtered pure iron films
Author :
Ishiwata, N. ; Wakabayashi, C. ; Matsumoto, T. ; Ishiwata, N. ; Wakabayashi, C. ; Matsumoto, Tad
Author_Institution :
NEC Home Electronics Ltd., Kawasaki, Japan
Volume :
23
Issue :
5
fYear :
1987
fDate :
9/1/1987 12:00:00 AM
Firstpage :
2152
Lastpage :
2154
Abstract :
Pure Iron films have been prepared using Dual Ion Beam Sputtering DIBS apparatus, and the magnetic properties dependence on the crystal structure has been investigated. In this study, the preparation parameters were substrate temperature Ts, acceleration voltage for Ar ions which sputter the target Vacc., and acceleration voltage for assistant Ar ions onto the surface of growing films Vsub.acc.. With an increace in Vacc., the preferred orientation changed from the
Keywords :
Ion radiation effects; Crystallization; Ion beams; Iron; Magnetic field measurement; Magnetic films; Magnetic properties; Magnetostriction; Optical films; Reflection; X-ray diffraction;
fLanguage :
English
Journal_Title :
Magnetics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9464
Type :
jour
DOI :
10.1109/TMAG.1987.1065285
Filename :
1065285
Link To Document :
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