Perpendicular magnetic anisotropy of reactively sputtered cobalt nitride thin films

This paper discusses the perpendicular magnetic anisotropy of reactively sputtered cobalt nitride thin films. The perpendicular anisotropy is induced in an almost single γ phase film, and does not depend on its crystallite orientation. The films with the anisotropy exhibit a clear columnar structure. The structure changes to a granular one as temperature increases above 300°C. This change is caused by the nitrogen dissociation from the films. Finally, the actual measurements on recording characteristics are performed on CoNx films, and high density perpendicular recording is realized.