Design and Analysis of Laminated Stainless Steel Membrane-Based Microsensors

This paper investigates multiarrayed (6 times 6) sensors based on laminated stainless steel membrane on the stainless steel substrate. For the fabrication of those sensors, micromachining techniques are combined with lamination process techniques. For the lamination between diaphragm and substrate, hot pressing technique is used with epoxy resin. The finite-element method is adopted to investigate the mechanical characteristics of membrane formed in the process and the electromechanical characteristics of sensors are measured. As results, the sensitivity of the device fabricated using these technologies is 9.03 ppm kPa^-1 with a net capacitance change of 0.14 pF over a range 0-178 kPa.