Title :
Bi-substituted garnet films crystallized during RF sputtering for M-O memory
Author :
Gomi, X. ; Okazaki, T. ; Abe, M. ; Gomi, Manabu ; Okazaki, Tadatsugi ; Abe, Makoto
Author_Institution :
Tokyo Institute of Technology, Meguro-ku, Tokyo, Japan
fDate :
9/1/1987 12:00:00 AM
Abstract :
We have successfully got Bi-substituted garnet films on glass substrates by in situ sputter growth above 500°C. When sputter-crystallized just above 500°C, the films had a good surface smoothness and a high crystallographic quality as compared to the post-annealed Film. The films had a preferred crystal orientation of
Keywords :
Magnetooptic memories; Argon; Bismuth; Crystallization; Garnet films; Optical films; Optical microscopy; Radio frequency; Solids; Sputtering; Temperature;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.1987.1065444
