Title :
Phase-shifted diffraction-grating fabrication using holographic wavefront reconstruction
Author :
Ono, Yuto ; Takano, Shigeru ; Mito, I. ; Nishida, N.
Author_Institution :
NEC Corporation, Opto-Electronics Research Laboratories, Kawasaki, Japan
Abstract :
A ¿-phase-shifted grating for a distributed-feedback laser diode with 1-2 ¿m phase-transition region has been fabricated by a new simple interference exposure method using a holographically reconstructed phase-shifted wavefront.
Keywords :
holographic gratings; optoelectronic devices; 1 to 2 micron; distributed-feedback laser diode; fabrication; holographic wavefront reconstruction; holographically reconstructed phase-shifted wavefront; interference exposure method; phase-shifted diffraction grating; phase-transition region;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19870042
