Title :
A new thin-film thermal detector
fDate :
9/1/1967 12:00:00 AM
Keywords :
Capacitors; Diodes; Electron beams; Electron optics; Infrared detectors; Optical arrays; Optical films; Silicon; Temperature sensors; Transistors;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1967.16025