DocumentCode

1029347

Title

Tunnel inspection and trapping of electrons in aluminum-silicon nitride-silicon dioxide-silicon (MNOS) capacitors

Author

Szedon, J.R. ; Chu, T.L.

Volume

14

Issue

9

fYear

1967

fDate

9/1/1967 12:00:00 AM

Firstpage

631

Lastpage

631

Keywords

Capacitors; Crystallization; Electron traps; Inspection; Instruments; Laboratories; Piezoresistance; Silicon; Temperature; Transducers;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1967.16053

Filename

1474776