Title :
Tunnel inspection and trapping of electrons in aluminum-silicon nitride-silicon dioxide-silicon (MNOS) capacitors
Author :
Szedon, J.R. ; Chu, T.L.
fDate :
9/1/1967 12:00:00 AM
Keywords :
Capacitors; Crystallization; Electron traps; Inspection; Instruments; Laboratories; Piezoresistance; Silicon; Temperature; Transducers;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1967.16053
