The micro-structure of γ-Fe2O3film with Ar-O2-H2O process

The micro-structure of the γ-Fe2O3film with reactive sputtering process in Ar-O2-H2O was studied using X-ray diffraction and a cross-sectional High-Resolution TEM. The results are as follows: the film has a columnar structure and the diameter of each column is 100-300 Å; both <111> oriented columns and micro-crystallite columns coexist in the film; the crystallinity in the micro-crystallite columns was found to contribute to the magnetic properties.