Title :
Optically excited resonant diaphragm pressure sensor
Author :
Uttamchandani, Deepak ; Thornton, K.E.B. ; Nixon, J. ; Culshaw, Brian
Author_Institution :
University of Strathclyde, Department of Electronic & Electrical Engineering, Glasgow, UK
Abstract :
Silicon diaphragms fabricated by anisotropic etching are coated with a thin layer of aluminium. An intensitymodulated laser beam focused on the diphragm generates transverse vibrations which are detected interferometrically. Differential pressure is applied to the diaphragm and the pressure-induced change in the fundamental resonant frequency is reported.
Keywords :
diaphragms; laser beam applications; light interferometry; nonelectric sensing devices; pressure transducers; Al coating; Si diaphragm; anisotropic etching; fundamental resonant frequency; intensity-modulated laser beam; interferometric detection; resonant diaphragm pressure sensor; transverse vibrations;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19870107
