DocumentCode
1029816
Title
A bibliography of metal-insulator-semiconductor studies
Author
Schlegel, Earl S.
Author_Institution
Philco-Ford Corporation, Blue Bell, Pa.
Volume
14
Issue
11
fYear
1967
fDate
11/1/1967 12:00:00 AM
Firstpage
728
Lastpage
749
Abstract
A bibliography of more than 550 papers in the field of metal-insulator-semiconductor theory and technology provides a catalog of the published work so that investigators can more easily relate their work to that reported by others. In most of the papers, the insulator layer discussed is SiO2 or silicon nitride, and the semiconductor is silicon. The information has been arranged according to the following major classifications: MOS transistor behavior physics preparation of oxide layers techniques for evaluating insulator layers related information from the field of glass technology device fabrication technology radiation effects alternative materials.
Keywords
Bibliographies; Fabrication; Glass; Insulation; MOSFETs; Metal-insulator structures; Paper technology; Physics; Radiation effects; Silicon on insulator technology;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1967.16101
Filename
1474824
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