• DocumentCode
    1029816
  • Title

    A bibliography of metal-insulator-semiconductor studies

  • Author

    Schlegel, Earl S.

  • Author_Institution
    Philco-Ford Corporation, Blue Bell, Pa.
  • Volume
    14
  • Issue
    11
  • fYear
    1967
  • fDate
    11/1/1967 12:00:00 AM
  • Firstpage
    728
  • Lastpage
    749
  • Abstract
    A bibliography of more than 550 papers in the field of metal-insulator-semiconductor theory and technology provides a catalog of the published work so that investigators can more easily relate their work to that reported by others. In most of the papers, the insulator layer discussed is SiO2or silicon nitride, and the semiconductor is silicon. The information has been arranged according to the following major classifications: MOS transistor behavior physics preparation of oxide layers techniques for evaluating insulator layers related information from the field of glass technology device fabrication technology radiation effects alternative materials.
  • Keywords
    Bibliographies; Fabrication; Glass; Insulation; MOSFETs; Metal-insulator structures; Paper technology; Physics; Radiation effects; Silicon on insulator technology;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1967.16101
  • Filename
    1474824