Title :
(Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators
Author :
Tilmans, H.A.C. ; Legtenberg, R. ; Schurer, H. ; Ijntema, D.J. ; Elwenspoek, M. ; Fluitman, J.H.J.
Author_Institution :
MESA Res. Inst., Twente Univ., Enschede, Netherlands
Abstract :
The design, fabrication and performance of vacuum-encapsulated electrostatically driven polysilicon resonating beams, 210-510 /spl mu/m long, 100 /spl mu/m wide, and 1.5 /spl mu/m thick, are described. The shortest beams have a fundamental frequency of 324 kHz, a gauge factor of 2400 and a quality factor of 600 at cavity pressures of 0.15 mbar. Intrinsic quality factors of 18000 were measured below 0.01 mbar.<>
Keywords :
electrostatic devices; elemental semiconductors; encapsulation; micromechanical devices; resonators; silicon; strain gauges; 0.01 mbar; 0.15 mbar; 1.5 micron; 100 micron; 210 to 510 micron; 324 kHz; Si; cavity pressures; design; electro-mechanical characteristics; electrostatically driven vacuum encapsulated polysilicon resonators; fabrication; fundamental frequency; gauge factor; intrinsic quality factors; performance; quality factor; resonant strain gauge; resonating beams; Capacitive sensors; Chemicals; Conducting materials; Electrostatics; Fabrication; Frequency; Mechanical sensors; Q factor; Resonance; Silicon;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
