The dependence of the growth-induced anisotropy energy(Kg) on growth rate and film composition was investigated for YSmLuCaGeIG LPE films. Kg was found to depend on site preference probability as a function of growth rate as well as on film composition. We improved Eschenfelder\´s formula by taking growth rate into account. The site preference probability is expressed,

, where β is the parameter related to film composition. The value of n is a constant of 2/3, and β decreases as the rare-earth ion-pairs increase. Excellent agreement between the calculated and measured values was obtained for SmLuCaGeIG LPE films.