Dynamic Geometric Compensation for Gantry Stage Using Iterative Learning Control

Author

Teo, Chek-Sing ; Tan, Kok-Kiong ; Lim, Ser-Yong

Author_Institution

Nat. Univ. of Singapore, Singapore

Volume

57

Issue

2

fYear

2008

Firstpage

413

Lastpage

419

Abstract

In this paper, iterative learning control is used in a gantry stage to compensate for dynamic errors, hence improving the tracking accuracy of the system by using a dual-axis high-grade analog optical encoder as a reference in calibrating and modeling dynamical geometric errors. This proposed approach is able to compensate the errors for a given trajectory set. Experimental and simulation results are provided to highlight the principles and practical applicability of the proposed method that results from such an approach.

Keywords

adaptive control; compensation; iterative methods; learning systems; motion control; dual-axis high-grade analog optical encoder; dynamic geometric compensation; gantry stage; iterative learning control; permanent-magnet linear motors; Aerodynamics; Aerospace industry; Application software; Calibration; Costs; Error correction; Interpolation; Manufacturing industries; Optical control; Solid modeling; Dual-axis encoder; dynamic compensation; gantry stage; iterative learning control (ILC); permanent-magnet linear motors (PMLMs);

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/TIM.2007.910103

Filename

4427401