Title :
Al2O3-SiO2IGFET integrated circuits
Author :
Cheney, G.T. ; Jacobs, Ryan M.
fDate :
6/1/1968 12:00:00 AM
Keywords :
Aluminum oxide; Circuits; Dielectrics; Etching; Logic arrays; Metallization; Shift registers; Silicon; Switches; Voltage;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1968.16206
