DocumentCode

1030832

Title

Silane-deposited SiO2in LSI

Author

Wagner, S.R. ; Doelp, W.L., Jr.

Volume

15

Issue

6

fYear

1968

fDate

6/1/1968 12:00:00 AM

Firstpage

410

Lastpage

410

Keywords

Bipolar transistors; Circuits; Fabrication; Large scale integration; MOSFETs; Moisture; Shift registers; Silicon compounds; Substrates; Threshold voltage;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1968.16209

Filename

1475111