DocumentCode :
1031444
Title :
Wafer-chip assembly for large-scale integration
Author :
Kraynak, P. ; Fletcher, Peter
Volume :
15
Issue :
6
fYear :
1968
fDate :
6/1/1968 12:00:00 AM
Firstpage :
421
Lastpage :
422
Keywords :
Assembly; Bonding forces; Integrated circuit technology; Integrated circuit yield; Joining processes; Large scale integration; Metallization; Packaging; Silicon devices; Wafer bonding;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1968.16270
Filename :
1475172
Link To Document :
بازگشت