Trench CCD image sensor

Author

Yamada, Takahiro ; Fukumoto, Akira

Author_Institution

Matsushita Electr. Ind. Co. Ltd., Osaka, Japan

Volume

35

Issue

3

fYear

1989

fDate

8/1/1989 12:00:00 AM

Firstpage

360

Lastpage

367

Abstract

The authors describe and present simulation data on the device structure, process flow, and operation of the Trench CCD (charge coupled device), which is being developed to increase the resolution of solid-state image sensors. The device provides larger dynamic range, higher sensitivity, and no image lag together with great packing density. A charge transfer channel formed around a trench eliminates the problem of insufficient dynamic range, which restricts the resolution. Because the Trench CCD occupies a small percentage of the total pixel area, the aperture area is increased, leading to improved sensitivity. Trench fabrication technology is used in dynamic RAM production; hence, further refinements can be expected to enable improvement of CCD image sensor performance parameters other than dynamic range. These features allow the development of a Trench CCD with 2 million pixels for 2/3-in and smaller optical systems, bringing a practical consumer HDTV (high-definition TV) camera closer to reality

Keywords

CCD image sensors; colour television cameras; high definition television; CCD image sensor; charge coupled device; charge transfer channel; colour TV cameras; consumer HDTV camera; device structure; dynamic RAM production; dynamic range; high-definition TV; optical systems; packing density; performance parameters; process flow; sensitivity; simulation data; solid-state image sensors; Apertures; Charge coupled devices; Charge transfer; Charge-coupled image sensors; Dynamic range; HDTV; Image resolution; Image sensors; Solid modeling; Solid state circuits;

fLanguage

English

Journal_Title

Consumer Electronics, IEEE Transactions on

Publisher

ieee

ISSN

0098-3063

Type

jour

DOI

10.1109/30.44291

Filename

44291