Title :
Electron resists for microcircuit fabrication
fDate :
6/1/1968 12:00:00 AM
Keywords :
Circuits; Electrons; Fabrication; Image generation; Interference; Lenses; Optical filters; Optical imaging; Resists; Substrates;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1968.16351
