DocumentCode
1033006
Title
High-pitch metal-on-glass technology for pad pitch adaptation between detectors and readout electronics
Author
Ullán, Miguel ; Lozano, Manuel ; Campabadal, Francesca ; Fleta, Celeste ; García, Carmen ; González, Francisco ; Bernabeu, José
Author_Institution
Centro Nacional de Microelectron., Barcelona, Spain
Volume
51
Issue
3
fYear
2004
fDate
6/1/2004 12:00:00 AM
Firstpage
968
Lastpage
974
Abstract
Modern high-energy physics and astrophysics strip detectors have increased channel density to levels at which their connection with readout electronics has become very complex due to high pad pitch. Also, direct wire bonding is prevented by the fact that typically detector´s pad pitch and electronics´ pad pitch do not match. A high-pitch metal-on-glass technology is presented, that allows pad pitch adaptation between detectors and readout electronics. It consists of high-density metal lines on top of an insulating glass substrate. A photoresist layer is deposited covering the metal tracks for passivation and protection The technology is tested for conductivity, bondability, bonding pull force, peel off, and radiation hardness, and it is an established technology in the clean room of the CNM Institute in Barcelona. This technology has been chosen by the ATLAS Collaboration for the pad pitch adapters (PPA) of the SCT Endcap Modules, by a Compton camera project, and by other HEP groups for interconnection between detectors and readout electronics.
Keywords
cosmic ray apparatus; hybrid integrated circuits; integrated circuit bonding; integrated circuit interconnections; integrated circuit metallisation; passivation; photoresists; position sensitive particle detectors; readout electronics; thin film circuits; ATLAS Collaboration; Compton camera project; SCT endcap modules; astrophysics strip detector; bondability; bonding pull force; channel density; conductivity; direct wire bonding; high-density metal lines; high-energy physics strip detector; high-pitch metal-on-glass technology; hybrid integrated circuit bonding; hybrid integrated circuit interconnection; insulating glass substrate; integrated circuit metallization; metal tracks; microstrip radiation detector; pad pitch adaptation; passivation; peel off testing; photoresist layer deposition; protection aspect; radiation hardness; readout electronics; thin film circuit fabrication; Astrophysics; Bonding forces; Detectors; Glass; Insulation; Physics; Readout electronics; Resists; Strips; Wire; Hybrid integrated circuit bonding; Hybrid integrated circuit interconnections; integrated circuit bonding; integrated circuit metallization; interconnections; microstrip; radiation detectors; thin film circuit fabrication;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/TNS.2004.829365
Filename
1312001
Link To Document