A system for semiconductor process specification

Author

Durbeck, Diane ; Chern, Jue-Hsien ; Boning, Duane S.

Author_Institution

Texas Instrum., Dallas, TX, USA

Volume

6

Issue

4

fYear

1993

fDate

11/1/1993 12:00:00 AM

Firstpage

297

Lastpage

305

Abstract

The SPEC system for capturing and managing semiconductor fabrication process information is discussed. The SPEC data model decomposes process specifications into equipment, step, process, and flow hierarchies. Mechanisms within an interactive graphical user interface provide a high degree of user control over the expression and organization of objects within each layered hierarchy and control the information in terms of collection, propagation to other layers, and the appearance of the data within specification folders using a what you see is what you get (WYSIWYG) folder builder. Implementation on a concurrent object-oriented database permits simultaneous use of the SPEC system by many users

Keywords

data acquisition; graphical user interfaces; manufacturing data processing; object-oriented databases; semiconductor device manufacture; semiconductor technology; SPEC system; concurrent object-oriented database; equipment hierarchies; fabrication process information; flow hierarchies; folder builder; interactive graphical user interface; layered hierarchy; process hierarchies; process specifications; semiconductor process specification; user control; Data models; Dynamic programming; Electronic equipment manufacture; Fabrication; Graphical user interfaces; Helium; Object oriented databases; Semiconductor device manufacture; Semiconductor devices; User interfaces;

fLanguage

English

Journal_Title

Semiconductor Manufacturing, IEEE Transactions on

Publisher

ieee

ISSN

0894-6507

Type

jour

DOI

10.1109/66.267639

Filename

267639