Title :
Failure analysis of ULSI circuits using photon emission
Author :
Uraoka, Yukiharu ; Miyanaga, Isao ; Tsuji, Kazuhiko ; Akiyama, Shigenobu
Author_Institution :
Matsushita Electr. Ind. Co. Ltd., Osaka, Japan
fDate :
11/1/1993 12:00:00 AM
Abstract :
A real-time failure analysis technique for ULSI circuits using photon emission is proposed. This technique utilizes a photon detection system combined with a circuit tester. Improved failure detection is achieved because the tester can bias arbitrary blocks in the ULSI chip. Detecting and correct process defects and design errors improves the reliability of the ULSI chip
Keywords :
VLSI; circuit reliability; failure analysis; integrated circuit testing; production testing; ULSI circuits; circuit tester; design errors; failure detection; photon detection system; photon emission; process defects; real-time failure analysis technique; Cable shielding; Central Processing Unit; Circuit testing; Failure analysis; Large scale integration; Optical filters; Optical microscopy; Signal generators; Test pattern generators; Ultra large scale integration;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
