• DocumentCode
    1034007
  • Title

    Electrothermally excited silicon beam mechanical resonators

  • Author

    Othman, M.B. ; Brunnschweiler, A.

  • Author_Institution
    University of Southampton, Department of Electronics & Computer Science, Southampton, UK
  • Volume
    23
  • Issue
    14
  • fYear
    1987
  • Firstpage
    728
  • Lastpage
    730
  • Abstract
    Silicon micromechanical resonators are described which use a polysilicon resistor for both electrothermal excitation and piezoresistive sensing. By suitable design these devices may have a very low temperature coefficient of frequency and be used as both frequency references and pressure sensors.
  • Keywords
    crystal resonators; electric sensing devices; elemental semiconductors; piezoelectric semiconductors; silicon; Si; cantilever beam; electrothermal excitation; frequency references; low temperature coefficient of frequency; micromechanical resonators; piezoresistive sensing; polysilicon resistor; pressure sensors;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19870517
  • Filename
    4257852
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1034007