Title :
Electrothermally excited silicon beam mechanical resonators
Author :
Othman, M.B. ; Brunnschweiler, A.
Author_Institution :
University of Southampton, Department of Electronics & Computer Science, Southampton, UK
Abstract :
Silicon micromechanical resonators are described which use a polysilicon resistor for both electrothermal excitation and piezoresistive sensing. By suitable design these devices may have a very low temperature coefficient of frequency and be used as both frequency references and pressure sensors.
Keywords :
crystal resonators; electric sensing devices; elemental semiconductors; piezoelectric semiconductors; silicon; Si; cantilever beam; electrothermal excitation; frequency references; low temperature coefficient of frequency; micromechanical resonators; piezoresistive sensing; polysilicon resistor; pressure sensors;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19870517
