Title :
Internal dielectric transduction: optimal position and frequency scaling
Author :
Weinstein, Dana ; Bhave, Sunil A.
Author_Institution :
Cornell Univ., Ithaca
fDate :
12/1/2007 12:00:00 AM
Abstract :
We propose the optimal design for "internal dielectric transduction" of longitudinal bulk mode resonators. This transduction increases in efficiency as the dielectric thickness approaches half the acoustic wavelength. With dielectric films at positions of maximum strain (minimum displacement) in the resonator, 60 GHz resonators are proposed with 50 Omega motional impedance.
Keywords :
dielectric resonators; dielectric thin films; thin film devices; acoustic wavelength; dielectric films; frequency 60 GHz; frequency scaling; internal dielectric transduction; longitudinal bulk mode resonators; Air gaps; Dielectric films; Electrostatics; Impedance; Micromechanical devices; Permittivity; Q factor; Resonance; Resonant frequency; Transducers;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2007.598