DocumentCode :
1034331
Title :
Internal dielectric transduction: optimal position and frequency scaling
Author :
Weinstein, Dana ; Bhave, Sunil A.
Author_Institution :
Cornell Univ., Ithaca
Volume :
54
Issue :
12
fYear :
2007
fDate :
12/1/2007 12:00:00 AM
Firstpage :
2696
Lastpage :
2698
Abstract :
We propose the optimal design for "internal dielectric transduction" of longitudinal bulk mode resonators. This transduction increases in efficiency as the dielectric thickness approaches half the acoustic wavelength. With dielectric films at positions of maximum strain (minimum displacement) in the resonator, 60 GHz resonators are proposed with 50 Omega motional impedance.
Keywords :
dielectric resonators; dielectric thin films; thin film devices; acoustic wavelength; dielectric films; frequency 60 GHz; frequency scaling; internal dielectric transduction; longitudinal bulk mode resonators; Air gaps; Dielectric films; Electrostatics; Impedance; Micromechanical devices; Permittivity; Q factor; Resonance; Resonant frequency; Transducers;
fLanguage :
English
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher :
ieee
ISSN :
0885-3010
Type :
jour
DOI :
10.1109/TUFFC.2007.598
Filename :
4430062
Link To Document :
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