• DocumentCode
    1034901
  • Title

    MOS transistors and integrated circuits with plasma-grown aluminum oxide

  • Author

    Waxman, A. ; Zaininger, K.H.

  • Volume
    16
  • Issue
    2
  • fYear
    1969
  • fDate
    2/1/1969 12:00:00 AM
  • Firstpage
    236
  • Lastpage
    236
  • Keywords
    Aluminum oxide; Anodes; Cathodes; Integrated circuit technology; Laboratories; MOSFETs; Plasma devices; Pulse amplifiers; Pulse modulation; Radiofrequency amplifiers;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1969.16616
  • Filename
    1475658