Title :
MOS transistors and integrated circuits with plasma-grown aluminum oxide
Author :
Waxman, A. ; Zaininger, K.H.
fDate :
2/1/1969 12:00:00 AM
Keywords :
Aluminum oxide; Anodes; Cathodes; Integrated circuit technology; Laboratories; MOSFETs; Plasma devices; Pulse amplifiers; Pulse modulation; Radiofrequency amplifiers;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1969.16616
