DocumentCode
1034963
Title
GaAs/AlGaAs ridge waveguide laser monolithically integrated with a photodetector using ion beam etching
Author
Bouadma, N. ; Grosmaire, S. ; Brillouet, F.
Author_Institution
Centre National d´Etudes des Telecommunications, Laboratoire de Bagneux, Bagneux, France
Volume
23
Issue
16
fYear
1987
Firstpage
855
Lastpage
857
Abstract
A GaAs/AlGaAs ridge waveguide laser is monolithically integrated with a monitoring photodiode. The laser diode and the photodiode have, respectively, vertical and slanted etched facets fabricated by an ion beam etching (IBE) process. The laser threshold currents range from 25 mA to 45 mA and the photodiode has a sensitivity of 5¿A/mW at unbiased voltage.
Keywords
aluminium compounds; gallium arsenide; integrated optoelectronics; semiconductor junction lasers; sputter etching; 25 to 45 mA; GaAs-AlGaAs; ion beam etching; laser threshold currents; monolithically integrated; photodetector; ridge waveguide laser; sensitivity; slanted etched facets; unbiased voltage; vertical etched facets;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19870605
Filename
4257942
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