DocumentCode
1035096
Title
New structure of three-terminal GaAs p+-n--δ(p+)-n--n+ switching device prepared by molecular beam epitaxy
Author
Wang, Y.H. ; Yarn, K.F. ; Chan, C.Y. ; Jame, M.S.
Author_Institution
National Cheng Kung University, Semiconductor and System Laboratories, Institute of Electrical and Computer Engineering, Tainan, Republic of China
Volume
23
Issue
17
fYear
1987
Firstpage
873
Lastpage
874
Abstract
The concept to modulate the internal barrier of a regenerative switching device is proposed. A new structure of three-terminal GaAs p+-n--δ(p+)-n--n+ switching device prepared by molecular beam epitaxy is successfully developed. The third terminal was directly contacted to the δ(p+) barrier using the V-groove etching technique, in which the δ(p+) barrier height can be directly modulated by the external voltage. It is a voltage-controlled device.
Keywords
III-V semiconductors; gallium arsenide; molecular beam epitaxial growth; semiconductor switches; GaAs switch; MBE; V-groove etching technique; internal barrier modulation; molecular beam epitaxy; regenerative switching device; three-terminal switching device; voltage-controlled device;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19870618
Filename
4257956
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