Title :
Multilayer processing for magnetic film memory devices
Author_Institution :
IBM Corporation, Essex Junction, Vt
fDate :
9/1/1967 12:00:00 AM
Keywords :
Multilayer magnetic films; Magnetic devices; Magnetic films; Magnetic multilayers; Packaging; Sputtering; Vacuum technology;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.1967.1066036